FISCHERSCOPE^® X-RAY XDV^®SDD

• Premium model with universal application characteristics
• Highest excitation flexibility, for both the size of the measurement spot and the spectral composition
• With the silicon drift detector, even very high intensities > 100 kcps can be processed without a loss in energy resolution
• Very low detection limits and excellent repeatability
• Large and easily accessible measurement chamber
• Automated series testing with fast, programmable XY-stage

Typical fields of applications

• Inspection of very thin coatings, e.g. in the electronics and semiconductor industries
• Trace analysis, e. g. detection of harmful substances, according to RoHS, toy standards, packaging standards
• Gold and precious metal analysis with highest precision
• Photovoltaic industry
• Measurement of thickness and composition of NiP-layers

High performance X-ray fluorescence (XRF) measuring system with a programmable XY-stage and Z-axis for automated measurements of very thin coatings and for trace analysis
Measurements according to DIN EN ISO 3497 and ASTM B 568

FISCHERSCOPE^® X-RAY XDV^®-µ

• Measuring instrument optimised for micro-analysis
• Depending on the X-ray optics, structures with a size of 100 µm or less can be analysed
• Very high intensities and thus good precision
• Even for thin coatings, measurement uncertainty < 1 nm possible
• Suitable only for plane or nearly plane samples
• Large and spacious measurement chamber with a cutout (C-slot)
• Automated series testing with fast, programmable XY-stage

Typical fields of applications

• Measurement of coating systems on PC Boards, leadframes and wafers
• Measurement of coating systems on small components and thin wires
• Materials analysis on small structures and small components

X-ray fluorescence (XRF) measuring instrument with a polycapillary x-ray optics for automated measurements and analyses of coating thicknesses and compositions on very small components and structures
Measurements according to DIN EN ISO 3497 and ASTM B 568

FISCHERSCOPE^® X-RAY XDV^®-µ LD

• Microfocus tube Ultra with tungsten anode for even higher performance on smallest spots; Molybdenum anode optional
• Changeable filter
• Higher count rates and significantly reduced measurement times thanks to DPP+
• Polycapillary optics allow particularly small measuring spots withshort measuring times with high intensity
• Measuring spot approx.:Ø 60 µm
• Determination of metal content in electroplating baths with corresponding accessories
• Silicon drift detector with 20 or 50 mm² active area for highest precision with thin layers
• Up to 135 mm possible height of samples

Typical fields of applications

• Measuring on smallest components and structures like assembled and complex shaped PCBs, plug contacts, bonding areas, SMD components or thin wires
• Measuring of functional layers in the electronics and semiconductor industry
• Determination of complex multilayer systems
• Automated measuring, such as in quality control

FISCHERSCOPE^® X-RAY XDV^®-µ WAFER

• Microfocus tube Ultra with tungsten anode for even higher performance on smallest spots with µ- XRF; Molybdenum anode optional
• 4-fold Changeable filter
• DPP+ for highest precision even with short measuring times
• In-house manufactured polycapillary optics allow especially small measuring spots with high intensity
• Silicon drift detector with 20 or 50 mm² for highest precision with thin layers
• Vacuum table with holders for all standardwafer formats from 150- 300 mm
• Measuring spot approx.:Ø 10 or 20 µm (FWHM)
• Up to 5 mm possible height of samples
• Extensive options for automation withWinFTM^®

Typical fields of applications

• Measuring of smallest structures on wafers up to 12 inch diameter
• Analysis of very thin coatings, such as gold/palladium layers down to < 10 nm
• Determination of complex multilayer systems
• Automated measuring, such as in quality control

FISCHERSCOPE^® X-RAY XDV^®-µ PCB

• Microfocus tube Ultra with tungsten anode for even higher performance on smallest spots : Molybdenum anode optional
• 4-fold Changeable filter
• Up to 10 mm possible height of samples
• Polycapillary optics allow especially small measuring spots with short measuring times at high intensity
• Measuring spot approx.:Ø 10 or 20 µm (FWHM)
• High-precision programmable measuring table for PCBs up to 610 x 610mm, optionally with vacuum fixture
• Silicon drift detector with 20 or 50 mm² for highest precision with thin films
• Vacuum table with holders for all standardwafer formats from 150- 300 mm
• DPP+ for highest precision even with short measuring times

Typical fields of applications

• Measuring of smallest flat components and structures on PCBs up to 610 x 610 mm (24 x 24 in)
• Analysis of very thin coatings, such as gold/palladium layers down to < 3 nm or 10 nm
• Automated measuring, such as in quality control
• With the 10 μm option: Measuring with smallest measuring spot in combination with a large silicon drift detector
• With the vacuum table option: Measuring on flexible PCBs
• Full compliance with IPC standards 4552 and 4556 (ENIG, ENEPIG), 4553A (Silver) and 4554 (Tin)